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MODEL 1966A
FEATURES

Five output power supply with accelerating focus: −15 kV@10μA, +15 kV@1 mA, +30 kV@10 μA, −2 kV @ 10 μA, +5.5 V @ 0 to 3.5 A

  • Five high voltage outputs
  • Decelerating focus voltage
  • Floating filament supply
  • Extremely low ripple and outstanding stability
  • Low line and load regulation of high voltage outputs
  • All outputs short circuit and arc protected
  • Computer controlled via parallel digital differential interface
  • Each high voltage output current and voltage limited
  • Very good cross regulation
  • Very low crosstalk ripple
  • Very low temperature coefficient
  • Standard 19-inch rack mounted chassis: 19" × 22.5" × 10.5"
  • Common applications include electron-beam lithography
DESCRIPTION
Model 1966A is an obsolete product and is no longer manufactured. Product information is shown here for the benefit of customers who are still using it.

Model 1966A has five high voltage outputs. It features an accelerating focus voltage and a floating filament supply. It has extremely low ripple and outstanding stability.

SPECIFICATIONS
General
Input voltage120 VAC ± 10%
Input current1.2 A maximum
Input power95 W maximum
High voltage connector7 pin 10589-02 Connectronics
SchematicsBlock diagram for Model 1966A
Beam Supply
Output voltage−15 kV maximum
Output current10 μA
Set ability10 ppm/hr and 10 ppm/°C (5 ppm optional)
Stability< 15 V peak-to-peak
Ripple/Noise< 100 mV peak-to-peak
Extraction Supply (referenced to the beam voltage)
Output voltage+15 kV maximum
Output current1 mA
Set ability16-bit (0.23 V LSB)
Stability10 ppm/hr and 10 ppm/°C (5 ppm optional)
Ripple/Noise< 100 mV peak-to-peak
Accelerating Focus Supply (referenced to the ground)
Output voltage+30 kV maximum
Output current10 μA
Set ability16 bit (0.46 V LSB)
Stability10 ppm/hr and 10 ppm/°C (5 ppm optional)
Ripple/Noise< 150 mV peak-to-peak
Suppressor Supply (referenced to the beam voltage)
Output voltage−2 kV maximum
Output current10 μA
Set ability16 bit (0.46 V LSB)
Stability10 ppm/hr and 10 ppm/°C (5 ppm optional)
Ripple/Noise< 100 mV pp
Filament Current Supply (referenced to the beam voltage)
Output voltage5.5 V maximum
Output current0 to 3.5 A
Set ability16 bit (30 μA LSB)
Stability100 ppm/hr
Ripple/Noise< 1 mA at 2.5 A