Single output high voltage power supply: +0.01 to 30 kV @ 500 μA

The Model 2591 is a high-stability high voltage power supply designed for the difficult requirements of focused ion beam systems. It features low ripple and low stored energy. The low stored energy at the output reduces computer system upsets when arcing occurs within the beam column and prevents damage to the semiconductor wafer being probed.

The low output ripple is the result of using sine wave excitation to the high voltage multiplier, as well as the use of a novel ripple cancellation circuit. This avoids the use of a large value output capacitor, and sine wave excitation generates less noise on the input power line in comparison to square wave excitation.

The 2591 uses separate power return lines for the high voltage load, the input power, and the voltage programming reference. Separating these signals reduces unwanted interactions between the critical programming reference and the other circuits.