Single output high voltage power supply: +20 kV/30 kV @ 300μA

Model 1210 is a high-stability power supply designed for the difficult requirements of electron microprobes and focused ion beam systems. It features low ripple and low stored energy at the output, reducing computer system upsets when arcing occurs within the beam column, and preventing damage to the semiconductor wafer being probed. Outputs are available to 30 kV; the standard output voltage is 20 kV.

The low output ripple is the result of using sine wave excitation to the high voltage multiplier, in conjunction with the use of a novel ripple cancellation circuit. This avoids using a large-value output capacitor, and sine wave excitation generates less noise on the input power line in comparison to square wave excitation.

The 1210 uses separate power return lines for the high voltage load, the input power, and the voltage programming reference. Separating these signals reduces unwanted interactions between the critical programming reference and the other circuits.