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MODEL 1210
FEATURES

Single output high voltage power supply: +20 kV/30 kV @ 300μA

  • Output ripple under 150 mV at full load
  • Temperature coefficient under 15 ppm/°C
  • Low stored energy (under 1 J)
  • Low reflected ripple on input power line
  • Separate connections for HV output cable shield and programming reference
  • Very compact case size
DESCRIPTION
Model 1210 is an obsolete product and is no longer manufactured. Product information is shown here for the benefit of customers who are still using it.

Model 1210 is a high-stability power supply designed for the difficult requirements of electron microprobes and focused ion beam systems. It features low ripple and low stored energy at the output, reducing computer system upsets when arcing occurs within the beam column, and preventing damage to the semiconductor wafer being probed. Outputs are available to 30 kV; the standard output voltage is 20 kV.

The low output ripple is the result of using sine wave excitation to the high voltage multiplier, in conjunction with the use of a novel ripple cancellation circuit. This avoids using a large-value output capacitor, and sine wave excitation generates less noise on the input power line in comparison to square wave excitation.

The 1210 uses separate power return lines for the high voltage load, the input power, and the voltage programming reference. Separating these signals reduces unwanted interactions between the critical programming reference and the other circuits.

SPECIFICATIONS
Input
Input power120 VAC at 0.65 maximum
Output
Output voltage0.01 to 20 kV
Output current300 μA maximum
Line regulation0.002%
Load regulation0.002%
Output ripple<150 mV peak-to-peak maximum
Time stability0.005% per hour
0.01% per 8 hours
Temperature coefficient< 25 ppm/°C
General
Temperature range, operating0 to 50 °C
Dimensions114 × 117 × 241 mm
Output connectorCPS 130CBL compatible
Program voltage5 V in for 20 kV output
Voltage monitor40 u or 5 V for 20 kV output
Current monitor5 V for 300 μA output