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MODEL 1316
FEATURES

Single output unipolar power supply: ±20 kV @ 300 μA

  • Very low output ripple: under 200 mV peak-to-peak at full load and 30 kV at 1 mA (20 kV at 2 mA)
  • Temperature coefficient under 15 ppm/°C
  • Separate connections for HV output cable shield and programming reference
  • Overvoltage and overcurrent protection
  • Automatic output voltage recovery after arcs and short circuits
  • AC input
  • Local/remote programming and metering
  • Positive or negative polarity
DESCRIPTION

Model 1316 is ideal for system component or laboratory use in applications requiring a highly stable, highly regulated, low-noise source of high voltage power. It is available in a wide range of precision and ultra-precision configurations for system and laboratory use. Safety compliant to SEMI S2-93. All designs incorporate short-circuit and arc protection.

Typical applications include focused ion beam machines, electron microscopes, and electron beam lithography.

Please contact CPS for further information regarding customization options for the 1316.

SPECIFICATIONS
Input
Input power120 VAC at 0.65 maximum
Output
PolarityPositive or negative (factory selected)
Output voltage0.01 to 20 kV
Output current300 μA maximum
Line regulation0.002%
Load regulation0.002%
Output ripple< 150 mV peak-to-peak maximum
Time stability0.005% per hour
0.01% per 8 hours
Temperature coefficient< 25 ppm/°C
General
Operating temperature0 to 50 °C
Output connectorCPS 130CBL compatible
Program voltage5 V in for 20 kV output
Voltage monitor40 u or 5 V for 20 kV output
Current monitor5 V for 300 μA output
PRICES
Model Description Price Order Qty.
1 2–9
1316 Single output unipolar power supply: ±20 kV @ 300 μA $1,584 $1,426 Call
130CBL-01 30 kV cable with flying lead $332 $299
130CBL-02 30 kV cable with two connectors $575 $575