Single output unipolar high voltage power supply: ±20 kV @ 300 μA

Single output +0.01 to +20 kV or −0.01 to −20 kV
Very low output ripple: under 200 mV peak-to-peak at full load and 30 kV at 1 mA (20 kV at 2 mA)
Temperature coefficient under 15 ppm/°C
Separate connections for HV output cable shield and programming reference
Overvoltage and overcurrent protection
Automatic output voltage recovery after arcs and short circuits
AC input
Local/remote programming and metering
Positive or negative polarity

PRODUCTS & RESOURCES

DESCRIPTION

Model 1316 is a high voltage power supply ideal for system component or laboratory use in applications requiring a highly stable, highly regulated, low-noise source of high voltage power. It is available in a wide range of precision and ultra-precision configurations for system and laboratory use. Safety compliant to SEMI S2-93. All designs incorporate short-circuit and arc protection.

Typical applications include focused ion beam machines, electron microscopes, and electron beam lithography.

Please contact CPS for further information regarding customization options for the 1316.

SPECIFICATIONS

Input
Input power	120 VAC at 0.65 maximum
Output
Polarity	Positive or negative (factory selected)
Output voltage	0.01 to 20 kV
Output current	300 μA maximum
Line regulation	0.002%
Load regulation	0.002%
Output ripple	< 150 mV peak-to-peak maximum
Time stability	0.005% per hour 0.01% per 8 hours
Temperature coefficient	< 25 ppm/°C
General
Operating temperature	0 to 50 °C
Output connector	CPS 130CBL compatible
Program voltage	5 V in for 20 kV output
Voltage monitor	40 u or 5 V for 20 kV output
Current monitor	5 V for 300 μA output

PRICES

Model	Description	Price		Order Qty.
Model	Description	1	2–9	Order Qty.
1316	Single output unipolar high voltage power supply: ±20 kV @ 300 μA	$1,584	$1,426	Call
130CBL-01	30 kV cable with flying lead	$332	$299
130CBL-02	30 kV cable with two connectors	$575	$575

Single output unipolar high voltage power supply: ±20 kV @ 300 μA

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